Dual e-beam

  • PVD Products
  • Two 6-pocket (15 cc) e-beam sources
  • Co-evaporation capable
  • Film thickness monitoring
  • 10 kW dual power supply
  • Sample size: small pieces to 6 inch wafers
  • Sample rotation
  • Sample tilt up to 70 deg
  • Throw distance: 21″
  • Sample holder cooling
  • Load lock sample transfer
  • Recipe driven