Ion Mill 2
- IntlVAC Nanoquest II IBE
- Sample size: small pieces to 150 mm wafers
- Load lock sample transfer
- Sample tilt and rotation
- Sample cooling
- ICP 2.2 MHz power supply
- Ion beam energy: 100 to 1500 eV
- Gases available: Ar, O2, N2, CH4, CHF3
- SIMS end point detector
- In situ sample passivation with silicon nitride or oxide