Capabilities
The UD Nanofabrication Facility (UDNF) has world-class capabilities in the areas of lithography, deposition, etch, thermal processing, characterization, and device packaging. Below is a comprehensive list of our equipment and fees.
Facility Access
Users pay different fees to access the facility; UD users pay 21$/hr, external academic users pay $32/hr, and corporate users pay $79/hr. Additional fees for the use of specific equipment are listed below; some capabilities are available at no charge beyond the facility access fee. Although the fees are quoted on an hourly basis, we charge by the minute. We do not charge for staff time during safety training, facility orientation, or tool training. Monthly caps are extended to UD users; please contact Iulian Codreanu for details.
Film Casting
Type | Make | Model | UD Fee | Ext. Academic Fee | Corporate Fee | Notes |
---|---|---|---|---|---|---|
E-beam SBU1 | Brewer Science | CEE 200CBX | $0/hr | $0/hr | $0/hr | Spin-Bake Unit |
E-beam SBU2 | Brewer Science | CEE 200CBX | $0/hr | $0/hr | $0/hr | Spin-Bake Unit |
Photo SBU1 | Brewer Science | CEE 200CBX | $0/hr | $0/hr | $0/hr | Spin-Bake Unit |
Photo SBU2 | Brewer Science | CEE 200CBX | $0/hr | $0/hr | $0/hr | Spin-Bake Unit |
SU-8 SBU | Brewer Science | CEE 200CBX | $0/hr | $0/hr | $0/hr | Spin-Bake Unit |
Lithography
Type | Make | Model | UD Fee | Ext. Academic Fee | Corporate Fee | Notes |
---|---|---|---|---|---|---|
E-beam Writer | Raith | EBPG5200ES | $84/hr | $126/hr | $237/hr | |
Laser Writer | Heidelberg | MLA 100 | $32/hr | $48/hr | $105/hr | |
Mask Aligner | NXQ | NXQ8006 | 21$/hr | $32/hr | $79/hr |
Deposition
Type | Make | Model | UD Fee | Ext. Academic Fee | Corporate Fee | Notes |
---|---|---|---|---|---|---|
ALD | Oxford Instruments | FlexAL | $53/hr | $79/hr | $158/hr | |
Dual e-beam | PVD Products | $32/hr | $48/hr | $105/hr | Approved materials | |
E-beam/thermal | PVD Products | 21$/hr | $48/hr | $105/hr | Approved materials | |
PECVD | Plasma-Therm | Versaline | $32/hr | $48/hr | $105/hr | |
PLD | PVD Products | PLD-4000 | $53/hr | $79/hr | $158/hr | Approved materials |
Sputterer | PVD Products | $32/hr | $48/hr | $105/hr | Approved materials |
Dry Etch
Type | Make | Model | UD Fee | Ext. Academic Fee | Corporate Fee | Notes |
---|---|---|---|---|---|---|
Asher | Branson/IPC | 3000 | 21$/hr | $32/hr | $79/hr | |
Chlorine ICP | Plasma-Therm | Apex SLR | $32/hr | $48/hr | $105/hr | |
Fluorine ICP | Plasma-Therm | Apex SLR | $32/hr | $48/hr | $105/hr | |
Ion Mill | IntlVAC | Nanoquest | $32/hr | $48/hr | $105/hr | |
Ion Mill 2 | IntlVAC | Nanoquest II | $32/hr | $48/hr | $105/hr | |
Plasma cleaner | Harrick Plasma | PDC-001 | 21$/hr | $32/hr | $79/hr |
Thermal Processing
Type | Make | Model | UD Fee | Ext. Academic Fee | Corporate Fee | Notes |
---|---|---|---|---|---|---|
HMDS Oven | Yield Engineering | YES-310TA | $0/hr | $0/hr | $0/hr | |
Rapid Thermal Processor | Surface Science Integration | Solaris 150 | 21$/hr | $32/hr | $79/hr | |
Tube Furnace | Expertech | CTR-125 | 21$/hr | $32/hr | $79/hr | |
Vacuum Ovens | Thermo Scientific | VT 6060 | $0/hr | $0/hr | $0/hr |
Metrology
Type | Make | Model | UD Fee | Ext. Academic Fee | Corporate Fee | Notes |
---|---|---|---|---|---|---|
Ellipsometer | Woolam | M-2000 | $0/hr | $0/hr | $0/hr | |
Four-Point Probe Station | Jandel | MWP-6 | $0/hr | $0/hr | $0/hr | |
Microsopes | Zeiss | Axio Imager | $0/hr | $0/hr | $0/hr | Shuttle & Find for integration with the FE-SEM |
Profilometer | Bruker | Dektak | $0/hr | $0/hr | $0/hr | Includes film stress measurement capabilities |
SEM | Zeiss | Merlin | 21$/hr | $32/hr | $79/hr |
Packaging
Type | Make | Model | UD Fee | Ext. Academic Fee | Corporate Fee | Notes |
---|---|---|---|---|---|---|
Dicing Saw | ADT | 7122 | 21$/hr | $32/hr | $79/hr | Located outside cleanroom |
Wire Bonder | TPT | HB05 | 21$/hr | $32/hr | $79/hr | Located outside cleanroom |
Miscellaneous
Type | Make | Model | UD Fee | Ext. Academic Fee | Corporate Fee | Notes |
---|---|---|---|---|---|---|
Critical Point Dryer | Tousimis | Autosamdri-815, Series B | 21$/hr | $32/hr | $79/hr | |
Developing Station | Brewer Science | CEE 200XD | $0/hr | $0/hr | $0/hr | |
Mask Cleaner Station | Brewer Science | CEE 200XD | $0/hr | $0/hr | $0/hr | |
Ozone Cleaner | Novascan | PSD-UV8 | 21$/hr | $32/hr | $79/hr | |
Wet Benches (15) | Air Control | varies | $0/hr | $0/hr | $0/hr |
Service
UDNF will consider performing fabrication work on behalf of others. The service fee is $53/hr for UD users, $79/hr for external academic users, and $158/hr for corporate users. Please contact Iulian Codreanu for details.
Other Resources
UD has many additional resources that may be of interest to potential facility users. The links below will take you to additional information on other user facilities on campus. Keck Center for Advanced Microscopy & Microanalysis, Advanced Materials Characterization Laboratory, Materials Growth Facility, Delaware Biotechnology Institute.