Capabilities

The UD Nanofabrication Facility (UDNF) has world-class capabilities in the areas of lithography, deposition, etch, thermal processing, characterization, and device packaging. Below is a comprehensive list of our equipment and fees. Equipment details can be found here.

 

For Equipment Reservations please follow this link.

UDNF Capabilities

The UDNF includes equipment and infrastructure necessary to fabricate devices at a nanometer scale. Shown here is a spectroscopic ellipsometer, which uses polarized light to characterize thin film and bulk materials.

Facility Access

Users pay an hourly rate to access the facility; UD users pay $20/hr, external academic users pay $30/hr, and corporate users pay $75/hr. Additional hourly fees for the use of specific equipment are listed below; many capabilities are available at no charge beyond the facility access fee.  The monthly usage fees are capped for UD users; details are provided here.

 

 

Film Casting

Type Make Model UD Fee Ext. Academic Fee Corporate Fee Notes
E-beam SBU1 Brewer Science CEE 200CBX $0/hr $0/hr $0/hr Spin-Bake Unit
E-beam SBU2 Brewer Science CEE 200CBX $0/hr $0/hr $0/hr Spin-Bake Unit
Photo SBU1 Brewer Science CEE 200CBX $0/hr $0/hr $0/hr Spin-Bake Unit
Photo SBU2 Brewer Science CEE 200CBX $0/hr $0/hr $0/hr Spin-Bake Unit
SU-8 SBU Brewer Science CEE 200CBX $0/hr $0/hr $0/hr Spin-Bake Unit

 

Lithography

Type Make Model UD Fee Ext. Academic Fee Corporate Fee Notes
E-beam Writer Vistec EBPG5200ES $80/hr $120/hr $225/hr
Laser Writer Heidelberg MLA 100 $30/hr $45/hr $100/hr
Mask Aligner NXQ NXQ8006 $0/hr $0/hr $0/hr

Deposition

Type Make Model UD Fee Ext. Academic Fee Corporate Fee Notes
ALD Oxford Instruments FlexAL $50/hr $75/hr $150/hr
Evaporator 1 PVD Products $30/hr $45/hr $100/hr Approved materials
Evaporator 2 PVD Products $20/hr $45/hr $100/hr Approved materials
PECVD Plasma-Therm Versaline $30/hr $45/hr $100/hr
PLD PVD Products PLD-4000 $50/hr $75/hr $100/hr Coming Fall 2019
Sputterer PVD Products $30/hr $45/hr $100/hr Approved materials

 

Dry Etch

Type Make Model UD Fee Ext. Academic Fee Corporate Fee Notes
Asher Branson/IPC 3000 $0/hr $0/hr $0/hr
Chlorine ICP Plasma-Therm Apex SLR $30/hr $45/hr $100/hr
Fluorine ICP Plasma-Therm Apex SLR $30/hr $45/hr $100/hr
Ion Mill IntlVAC Nanoquest $30/hr $45/hr $100/hr
Plasma cleaner Harrick Plasma PDC-001 $0/hr $0/hr $0/hr

Thermal Processing

Type Make Model UD Fee Ext. Academic Fee Corporate Fee Notes
HMDS Oven Yield Engineering YES-310TA $0/hr $0/hr $0/hr
Rapid Thermal Processor Surface Science Integration Solaris 150 $20/hr $30/hr $75/hr
Tube Furnace Expertech CTR-125 $20/hr $30/hr $75/hr
Vacuum Ovens Thermo Scientific VT 6060 $0/hr $0/hr $0/hr

 

Metrology

Type Make Model UD Fee Ext. Academic Fee Corporate Fee Notes
Ellipsometer Woolam M-2000 $0/hr $0/hr $0/hr
Four-Point Probe Station Jandel MWP-6 $0/hr $0/hr $0/hr
Microsopes Zeiss Axio Imager $0/hr $0/hr $0/hr Shuttle & Find for integration with the FE-SEM
Profilometer Bruker Dektak $0/hr $0/hr $0/hr Includes film stress measurement capabilities
SEM Zeiss Merlin $20/hr $30/hr $75/hr

 

Packaging

Type Make Model UD Fee Ext. Academic Fee Corporate Fee Notes
Dicing Saw ADT 7122 $20/hr $30/hr $75/hr  Located outside cleanroom
Wire Bonder TPT HB05 $20/hr $30/hr $75/hr  Located outside cleanroom

 

Miscellaneous

Type Make Model UD Fee Ext. Academic Fee Corporate Fee Notes
Developing Station Brewer Science CEE 200XD $0/hr $0/hr $0/hr
Mask Cleaner Station Brewer Science CEE 200XD $0/hr $0/hr $0/hr
Ozone Cleaner Novascan PSD-UV8 $0/hr $0/hr $0/hr
Wet Benches (15) Air Control varies $0/hr $0/hr $0/hr

Service

UDNF will consider performing fabrication work on behalf of others. The service fee is $50/hr for UD users, $75/hr for external academic users, and $150/hr for corporate users. Please contact Iulian Codreanu for details.

Other Resources

UD has many additional resources that may be of interest to potential facility users. The links below will take you to additional information on other user facilities and equipment available through collaboration with individual faculty members. Keck Center for Advanced Microscopy & Microanalysis, Advanced Materials Characterization LaboratoryDelaware Biotechnology InstituteGroup IV Molecular Beam EpitaxyGroup III-V Molecular Beam EpitaxyChalcogenide Molecular Beam Epitaxy.