RTP
- SSI Solaris 150
- Maximum temperature: 1200 degC
- Ramp up rate: 150 degC/sec
- Temperature accuracy and stability: +/- 2.5 degC
- Temperature uniformity: +/- 2.5 degC across 6″ wafer
- Temperature measurement via thermocouple
- Gases available: 5%H2/N2, Ar, N2, O2
- Sample size: small pieces up to 6″ wafers