PLD

  • PVD Products
  • Six 2-inch or three 5-inch targets
  • 248 nm COMPex Pro 205 excimer laser
  • 50 sccm O2 MFC
  • Sample heating: 950 degC
  • Sample rotation
  • Sample size: small pieces to 4 inch wafers
  • Load lock sample transfer
  • Recipe driven