Thermal e-beam

  • PVD Products
  • One 6-pocket (15 cc) e-beam source
  • Two thermal sources
  • Co-evaporation (ebeam-thermal and thermal-thermal) capable
  • Film thickness monitoring
  • One 6 kW e-beam power supply
  • Two 2 kW thermal power supplies (10V-200A or 4V-500A)
  • Sample size: small pieces to 6 inch wafers
  • Throw distance: 21″
  • Sample rotation
  • Sample tilt up to 90 deg
  • Recipe driven