Thermal e-beam
- PVD Products
- One 6-pocket (15 cc) e-beam source
- Two thermal sources
- Co-evaporation (ebeam-thermal and thermal-thermal) capable
- Film thickness monitoring
- One 6 kW e-beam power supply
- Two 2 kW thermal power supplies (10V-200A or 4V-500A)
- Sample size: small pieces to 6 inch wafers
- Throw distance: 21″
- Sample rotation
- Sample tilt up to 90 deg
- Recipe driven