SEM
- Zeiss Merlin
- Accelerating voltage: 100V-30kV
- Probe current: 20pA-40nA
- Minimum resolution: 0.8 nm
- Five axis motorized stage with compucentric tilt and rotation
- Detectors: in-lens SE, in-lens backscattter, and chamber-mounted SE
- Load lock sample transfer (4″ capable)