Dual e-beam
- PVD Products
- Two 6-pocket (15 cc) e-beam sources
- Co-evaporation capable
- Film thickness monitoring
- 10 kW dual power supply
- Sample size: small pieces to 6 inch wafers
- Sample rotation
- Sample tilt up to 70 deg
- Throw distance: 21″
- Sample holder cooling
- Load lock sample transfer
- Recipe driven