SEM

  • Zeiss Merlin
  • Accelerating voltage: 100V-30kV
  • Probe current: 20pA-40nA
  • Minimum resolution: 0.8 nm
  • Five axis motorized stage with compucentric tilt and rotation
  • Detectors: in-lens SE, in-lens backscattter, and chamber-mounted SE
  • Load lock sample transfer (4″ capable)