Capabilities

The UD Nanofabrication Facility (UDNF) has world-class capabilities in the areas of lithography, deposition, etch, thermal processing, characterization, and device packaging. Below is a comprehensive list of our equipment and fees. Equipment details can be found here.

 

For Equipment Reservations please follow this link.

UDNF Capabilities
The UDNF includes equipment and infrastructure necessary to fabricate devices at a nanometer scale. Shown here is a spectroscopic ellipsometer, which uses polarized light to characterize thin film and bulk materials.

Facility Access

Users pay an hourly rate to access the facility; UD users pay $20/hr, external academic users pay $30/hr, and corporate users pay $75/hr. Additional hourly fees for the use of specific equipment are listed below; many capabilities are available at no charge beyond the facility access fee.  The monthly usage fees are capped for UD users; details are provided here.

 

 

Film Casting

Type Make Model UD Fee Ext. Academic Fee Corporate Fee Notes
E-beam Spinner #1 Brewer Science CEE 200CBX $0/hr $0/hr $0/hr Spinner-hot plate combo unit
E-beam Spinner #2 Brewer Science CEE 200CBX $0/hr $0/hr $0/hr Spinner-hot plate combo unit
Photo Spinner #1 Brewer Science CEE 200CBX $0/hr $0/hr $0/hr Spinner-hot plate combo unit
Photo Spinner #2 Brewer Science CEE 200CBX $0/hr $0/hr $0/hr Spinner-hot plate combo unit

 

Lithography

Type Make Model UD Fee Ext. Academic Fee Corporate Fee Notes
E-beam Writer Vistec EBPG5200ES $80/hr $120/hr $225/hr
Mask Aligner Neutronix-Quintel NXQ8006 $0/hr $0/hr $0/hr
Laser Writer* TBD TBD $30/hr $45/hr $100/hr  *Available soon

Deposition

Type Make Model UD Fee Ext. Academic Fee Corporate Fee Notes
PECVD Plasma-Therm Versaline $30/hr $45/hr $100/hr Gases available: SiH4, NH3, N2O, H2, CH4, N2, He, SF6
Dual e-beam evaporator PVD Products $30/hr $45/hr $100/hr 12 “pockets” available
E-beam / thermal evaporator PVD Products $20/hr $45/hr $100/hr 6 “pockets” and three “boats” available
Sputterer PVD Products $30/hr $45/hr $100/hr sputtering sources
ALD* Oxford Instruments FlexAL $30/hr $45/hr $100/hr

*Available soon

 

 

Dry Etch

Type Make Model UD Fee Ext. Academic Fee Corporate Fee Notes
Fluorine ICP Plasma-Therm Apex SLR $30/hr $45/hr $100/hr Gases available: CF4, CHF3, C4F8, SF6, H2, O2, Ar, He
Chlorine ICP Plasma-Therm Apex SLR $30/hr $45/hr $100/hr Gases available: Cl2, BCl3, SF6, O2, Ar, He (SiCl4 and HBr can be added)
Ion Mill IntlVAC Nanoquest $30/hr $45/hr $100/hr
Asher Branson/IPC 3000 $0/hr $0/hr $0/hr

Thermal Processing

Type Make Model UD Fee Ext. Academic Fee Corporate Fee Notes
Rapid Thermal Processor Surface Science Integration Solaris 150 $20/hr $30/hr $75/hr Gases available: H2/N2, O2, Ar, N2
Vacuum Ovens Thermo Scientific VT 6060 $0/hr $0/hr $0/hr
HMDS Oven Yield Engineering YES-310TA $0/hr $0/hr $0/hr
Tube Furnace* Expertech CTR-125 $0/hr $0/hr $0/hr  *Available soon

 

Metrology

Type Make Model UD Fee Ext. Academic Fee Corporate Fee Notes
FE-SEM Zeiss Merlin $20/hr $30/hr $75/hr
Microsopes Zeiss Axio Imager $0/hr $0/hr $0/hr Shuttle & Find for integration with the FE-SEM
Surface Profilometer Bruker Dektak $0/hr $0/hr $0/hr Includes film stress measurement capabilities
Spectroscopic Ellipsometer Woolam M-2000 $0/hr $0/hr $0/hr
Four-Point Probe Station Jandel MWP-6 $0/hr $0/hr $0/hr

 

Packaging

Type Make Model UD Fee Ext. Academic Fee Corporate Fee Notes
Dicing Saw* ADT 7122 $0/hr $0/hr $0/hr  *Available soon
Wire Bonder* TBD TBD $0/hr $0/hr $0/hr  *Available soon

 

Miscellaneous

Type Make Model UD Fee Ext. Academic Fee Corporate Fee Notes
Wet Processing Stations Air Control varies $0/hr $0/hr $0/hr
Mask Cleaner Station Brewer Science CEE 200XD $0/hr $0/hr $0/hr
Developing Station Brewer Science CEE 200XD $0/hr $0/hr $0/hr
Ozone Cleaner Novascan PSD-UV8 $0/hr $0/hr $0/hr

Service

UDNF will consider performing fabrication work on behalf of others. The service fee is $50/hr for UD users, $75/hr for external academic users, and $150/hr for corporate users. Please contact Iulian Codreanu for details.

Other Resources

UD has many additional resources that may be of interest to potential facility users. The links below will take you to additional information on other user facilities and equipment available through collaboration with individual faculty members. Keck Center for Advanced Microscopy & Microanalysis, Advanced Materials Characterization LaboratoryDelaware Biotechnology InstituteGroup IV Molecular Beam EpitaxyGroup III-V Molecular Beam EpitaxyChalcogenide Molecular Beam Epitaxy.